Loj Loj Chamber Arc Ion Plasma Txheej Tshuab

Lub hauv paus ntsiab lus ntawm arc ion plating yog tshawb fawb los ntawm lub hauv paus ntawm txoj kev xav ntawm txias cathode nqus arc paug.The core technology ntawm multi-arc ion txheej tshuab yog nws cov arc evaporation qhov chaw. Lub evaporation qhov chaw ntawm multi-arc ion txheej tshuab yog ib qho tshwj xeeb ntawm nws tus kheej evaporation thiab nws tus kheej-ionization khoom evaporationsource ntawm txias cathode arc paug.

Piv nrog rau cov tsoos evaporation qhov chaw, arc evaporation qhov chaw ntawm multi-arc ion coater muaj cov yam ntxwv pom tseeb:

Cov txheej txheem zaj duab xis muaj siab ntom ntom, lub neej ntev ntev thiab muaj zog;

Raws li cov khoom siv arc evaporation qhov chaw, nws cov duab, qhov loj thiab txoj haujlwm tuaj yeem hloov pauv;

Lub tshuab nqus tsev ua haujlwm loj;

siab zog ion;

High ionization tus nqi mus txog 60 feem pua ​​-80 feem pua ​​;

Cov nqi tso nyiaj siab, xws li TiN, tuaj yeem ua tiav qhov kev tso nyiaj siab ntawm 100nm / s ~ 1000nm / s.

Titanium nitride tuaj yeem siv los ua zaj duab xis coated ntawm iav. Thaum lub infrared reflectivity ntau dua 75 feem pua, thaum lub thickness ntawm titanium nitride zaj duab xis yog ntau dua 90nm, thermal rwb thaiv tsev kev ua tau zoo ntawm lub iav tuaj yeem txhim kho zoo. Tsis tas li ntawd, kho qhov feem pua ​​​​ntawm nitrogen hauv titanium nitride tuaj yeem hloov xim ntawm titanium nitride zaj duab xis, yog li ua tiav cov txiaj ntsig zoo nkauj.

Parameter

Daim ntawv thov

Peb lub tuam txhab

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