Tsim nta ntawm multi-chip sib piv nti ntaus ntawv ntawm lub tshuab nqus tsev txheej tshuab

1) Kho lub tog raj kheej 3 Tus tsim ntawm cylindrical zoo, txoj kab uas hla loj, tuab-walled qauv thiab circumferentially symmetrical kho txoj kev tuaj yeem ua kom muaj zog txaus thiab rigidity, thiab tib lub sijhawm, nws kuj tuaj yeem tiv thaiv qhov kub thiab txias sputtering abrasive los ntawm kev sib kis ntawm nws qhov chaw sab hauv. , los xyuas kom meej qhov yooj ntawm kev sib hloov ntawm lub dial 15 .

2) Tus qauv tsim ntawm lub rooj zaum ncig lub rooj zaum 2 xyuas kom lub sealing thiab verticality ntawm lub rooj zaum bearing installation; nce txoj kab uas hla ntawm tus ncej 1, nce qhov kev ncua deb ntawm ob lub bearings nyob rau hauv lub rooj zaum bearing 2, txhim kho nws tus kheej lub zog thiab rigidity, xyuas kom meej lub rigidity ntawm lub ncej 1 thiab lub rotational elasticity ntawm lub dial 15 thaum lub sij hawm kev sib hloov txheej txheem yog zoo ib yam. nrog lub repeatability ntawm txoj hauj lwm.

3) Kev thauj khoom ntawm lub tshuab hloov pauv, los ntawm kev nthuav dav txoj kab uas hla ntawm lub phaj txhawb nqa 16, thaj tsam zoo ntawm cov txheej txheem hauv lub dav hlau kev taw qhia tau nce, thiab cov yeeb yaj kiab sib piv nrog lub taub loj (Φ26.5mm) tuaj yeem ntsia tau, uas yog qhov tsim nyog. mus rau kev hloov kho ntawm txoj kev kho qhov muag thiab txhim kho qhov zoo ntawm cov yeeb yaj kiab kho qhov muag; Qhov sib piv daim 12 yog ua los ntawm ib daim iav ua ib qho piv txwv. Cov khoom sib piv siv cov txheej txheem spatial peb-dimensional stacking installation. Ntau daim iav yog stacked thiab ntsia rau hauv ib qho kev sib piv piece cia lub tog raj kheej 13, yog li ntawd 50 ~ 100 daim ntawm cov khoom sib piv tuaj yeem muab tso rau hauv ib lub sij hawm, uas daws qhov teeb meem ntawm lub tshuab txheej. Txheej multi-layer precision optical films, piv nrog cov teeb meem uas cov ntawv me me cuam tshuam rau cov txheej txheej txheej thiab qhov tseeb.

4) Kev koom tes ntawm qhov chaw ntawm lub phaj 6 thiab qhov sib txuas ntawm qhov sib txuas 17, los ntawm qhov sib txuas ntawm qhov sib txuas, peb qhov sib npaug sib npaug 120 degree slits ntawm lub phaj positioning yog paub, thiab kev sib hloov ntawm lub cev muaj zog yog tswj kom nres. . Qhov sib xws ntawm kev sib hloov thiab qhov chaw ntawm lub axis 1 yog lav kom rov ua dua, thiab lub xov tooj 15 tau tsav los ua kom tiav qhov kev hu xov tooj raug.

5) Lub tshuab nqus plua plav pub-hauv tshuab yog nkag mus rau hauv Wilson foob mechanism 5, uas tsis tsuas yog ua kom lub cev muaj zog 9 tsav kev hloov pauv hloov pauv ntawm lub ncej 1 los ntawm cov iav meshing, tab sis kuj ua kom lub sealing nyhuv ntawm lub tshuab nqus tsev chamber mus rau lub tshuab nqus tsev vacuum. sab nraum. Lub optimized tsim ntawm multi-chip sib piv cov cuab yeej ntawm lub tshuab nqus tsev txheej muaj cov yam ntxwv hauv qab no: (1) Cov qauv yooj yim, siab zog thiab kev ntseeg tau zoo; (2) Tus naj npawb ntawm cov chips sib piv yog qhov loj, qhov kev ua tau zoo yog txhim kho, thiab ultra-ntau txheej precision optics tuaj yeem coated (3) Txoj kab uas hla ntawm cov yeeb yaj kiab sib piv tau nce, qhov tseeb ntawm kev saib xyuas cov yeeb yaj kiab tau txhim kho, cov kev xav tau ntawm cov cuab yeej kho vajtse raug txo qis, thiab lub kaw lus yooj yim kom paub tswj tsis siv neeg; (4) Tus nqi tu yog tsawg.

Los ntawm kev tsim kho kom zoo ntawm cov khoom siv sib piv ntawm cov khoom siv ntawm lub tshuab nqus tsev, qhov hloov tau yooj yim ntawm kev sib hloov ntawm cov khoom sib piv thiab qhov sib xws ntawm kev rov ua dua tau ua kom ntseeg tau, thiab thaj tsam me me ntawm cov khoom sib piv, qhov tsis yooj yim hloov. txoj kev kho qhov muag, thiab cov teeb liab-rau- suab nrov piv ntawm cov teeb liab kho qhov muag raug daws. Nws kuj daws qhov teeb meem ntawm kev thauj khoom tsawg dua ntawm cov ntawv sib piv, uas tuaj yeem txhim kho qhov zoo ntawm cov yeeb yaj kiab kho qhov muag los ntawm lub tshuab nqus tsev uas twb muaj lawm, thiab cov yeeb yaj kiab kho qhov muag nrog ntau tshaj 30 txheej tuaj yeem coated. Kev xyaum tau ua pov thawj tias daim ntawv sib piv no muaj txiaj ntsig zoo thiab tuaj yeem txhawb nqa thiab siv tau hauv kev lag luam niaj hnub kho qhov muag tshuab nqus tsev.