Me PVD Txheej Tshuab

Lub hauv paus txheej txheem ntws ntawm evaporation txheej yog:

Kev npaj ua ntej plating → nqus tsev → ion bombardment → ci → pre-melting → evaporation → pick-up → zaj duab xis nto kho → khoom tiav

1. Kev npaj ua ntej plating

Cov txheej txheem suav nrog kev ntxuav ntawm plating qhov chaw, tsim khoom thiab tu cov evaporation qhov chaw, tu cov platingfixtures nyob rau hauv lub tshuab nqus tsev chamber, installation ntawm evaporation qhov chaw, installation ntawm plating qhov chaw, thiab lwm yam.

(1) Ntxuav thiab tuav ntawm cov khoom plated:

Qhov loj ntawm lub zog sib txuas ntawm cov zaj duab xis txheej thiab qhov chaw ntawm plated yog ib qho tseem ceeb qhia txog cov khoom zoo. Nws yog txiav txim los ntawm ntau yam, thiab kev kho deg ua ntej txheej yog ib qho tseem ceeb tshaj plaws. Yog tias muaj roj, dej adsorbed, plua plav, thiab lwm yam rau ntawm qhov chaw plated, nws yuav txo qis kev sib raug zoo ntawm zaj duab xis thiab cuam tshuam rau qhov roughness ntawm qhov chaw.

Tshuaj degreasing. Ntau yam hlau thiab tsis yog hlau plated yuav tsum tau txais cov txheej txheem degreasing thiab degreasing. Rau cov txheej txheem tshwj xeeb, koj tuaj yeem tshawb nrhiav degreasing hauv kab ke kev kawm ntawm lub vev xaib no kom pom cov khoom muaj feem xyuam.

Electrostatic precipitator. Cov khoom plated tau yooj yim them nrog hluav taws xob zoo li qub thaum lub sij hawm moldingprocess, uas tuaj yeem ua rau cov pinholes hauv txheej zaj duab xis lossis txo qhov kev sib txuas ntawm cov yeeb yaj kiab, yog li cov hluav taws xob zoo li qub yuav tsum raug tshem tawm ua ntej siv primer.

Primer. Feem ntau, lub thickness ntawm cov zaj duab xis nyob rau hauv qab ntawm cov evaporation yog {{0}}}05 ~ 0.1um, thaum lub nto unevenness ntawm zoo tib yam plating qhov chaw yog 0.5um, thiab lub thickness ntawm cov khoom. zaj duab xis nyob deb ntawm txaus los sau lub pits. Txhawm rau txo qhov roughness ntawm qhov chaw, ib qho tshwj xeeb primer ntawm 7 ~ 10um feem ntau yog siv rau ntawm qhov chaw ntawm cov plated kom tshem tawm cov pits thiab ua tiav cov nyhuv ntawm leveling saum npoo.

(2) Kev tsim cov evaporation qhov chaw:

Raws li kev siv cov khoom siv thiab cov khoom siv ntawm cov khoom siv plated, xaiv cov khoom siv evaporation tsim nyog yog qhov yooj yim rau kev tau txais cov yeeb yaj kiab zoo.

Lub hauv paus ntsiab lus ntawm kev xaiv cov ntaub ntawv hlau yog: zoo thermal stability thiab tshuaj stability, highmechanical zog, tsis tshua muaj kev nyuaj siab, thiab tej yam toughness, zoo bonding nrog primer, siab reflectivity, thiab outgassing nyob rau hauv lub tshuab nqus tsev vacuum. Me me; Cov khoom siv dav dav, tus nqi qis, thiab cov khoom sib thooj evaporation.

Cov ntaub ntawv sib txawv ntawm cov evaporation yuav tsum xaiv cov khoom siv evaporation thiab cov txheej txheem evaporation plating.

(3) Lub tshuab nqus tsev vacuum thiab plating fixture:

Yog tias lub tshuab nqus tsev nrog lub hau npog sab hauv muaj kuab paug, lub hau npog tuaj yeem raug tshem tawm los ntxuav lossis rov ua dua tshiab. Yog tias tsis muaj lub hau npog sab hauv, nws tuaj yeem so nrog calcium carbonate, ces so nrog dej, thiab thaum kawg so nrog anhydrous ethanol.

Feem ntau siv cov khoom siv txhuas tuaj yeem tsau rau hauv 20 feem pua ​​​​NaOH tov kom txog thaum lub npoo yog xim av, ces yaug nrog dej, soaked hauv HNO3 kom txog thaum xim av ploj, thiab tom qab ntawd ntxuav thiab qhuav.

(4) Nruab qhov evaporation qhov chaw:

Ceev faj hnav hnab looj tes degreasing, thiab cov cuab yeej yuav tsum tau degreased ua ntej. Ua tib zoo saib xyuas qhov zoo ntawm qhov chaw evaporation thiab electrode.

(5) Muab cov khoom plated:

Nws yuav tsum tau muab tso rau hauv av ntawm cov plated qhov chaw thiab cov plated qhov chaw ruaj khov thiab khov kho kom tsis txhob cuam tshuam cov platedparts los ntawm kev cuam tshuam los ntawm kev sib hloov ntawm lub fixture thaum evaporation. Hnav cov hnab looj tes degreasing, tsis txhob hais lus, thiab ua kom lub plated seem fixture huv si.

2. Nqus kauj ruam

Qhib lub qhov dej txias, kho kom haum rau qhov xav tau dej siab, txuas lub ntsiab fais fab, kaw lub tshuab nqus tsev vacuum ua rau lub tshuab nqus tsev, kaw lub raj xa dej, pib lub tshuab nqus tsev twj tso kua mis, thiab qhib lub tshuab nqus tsev vacuum. Nyob rau lub sijhawm no, lub tshuab nqus tsev twj tso kua mis tawm ntawm lub tshuab nqus tsev, tom qab ntawd ua cov foob pob hluav taws, tig rau lub tshuab nqus tsev twj tso kua mis cua sov, thiab kaw lub tshuab nqus tsev ua ntej. Thaum lub twj tso kua mis diffusion mus txog qhov yuav tsum tau ua haujlwm, kaw lub tshuab nqus tsev vacuum, qhib lub raj xa dej, thiab qhib lub tshuab nqus tsev siab. , diffusion twj tso kua mis, tshuab twj tso kua mis rau twj tso kua mis lub tshuab nqus tsev chamber, thaum lub tshuab nqus tsev mus txog ib tug tej yam nqi, ci, pre-melt thiab evaporate.

3. Ion foob pob tawg

Thaum lub teeb ci tawm, cov ions foob pob hluav taws xob kom tau txais kev kub ceev, thiab cov khoom plated tau them sai sai vim qhov loj ntawm cov khoom siv hluav taws xob. Muaj kev sib pauv hluav taws xob rau ntawm qhov chaw, thiab cov tshuaj tiv thaiv tshuaj tshwm sim ntawm cov txheej txheem adsorption ntawm daim plating thiab cov roj nquag kom ua tiav cov txiaj ntsig ntawm kev ntxuav ntawm qhov chaw.

Cov xwm txheej ntawm ion bombardment yog tias cov roj seem seem ruaj khov ntawm 0.13 ~ 13Pa, qhov hluav taws xob yog 1.5 ~ 10kV, thiab lub sijhawm yog 5 ~ 60min.

4. Ci

Nws tuaj yeem ua kom nrawm nrawm ntawm cov roj adsorbed los ntawm cov plated ib feem lossis cov khoom sib dhos, uas yog qhov zoo rau kev txhim kho lub tshuab nqus tsev kawm ntawv thiab lub zog sib txuas ntawm zaj duab xis txheej. Thaum ci, nws yuav tsum raug sau tseg tias qhov kub ntawm qhov ci rau cov khoom tsis yog xim hlau yuav tsum yog 20 ~ 30 degree qis dua qhov thermal deformation kub ntawm qhov plated. Cov hlau ci feem ntau tsis tshaj 200 degree.

5. Premelting

Nws tuaj yeem tshem tawm qhov qis melting point impurities nyob rau hauv cov khoom evaporation thiab cov roj adsorbed nyob rau hauv lub evaporationsource thiab evaporation cov ntaub ntawv, uas yog conducive mus rau lub smooth kev vam meej ntawm evaporation. Cov khoom yuav tsum tau ua ntej-melted dua, thiab qhov kev xav tau dav dav yog tias thaum cov khoom siv evaporation yog rhuab mus rau qhov kub thiab txias, lub tshuab nqus tsev yuav tsis poob.

6. Evaporation

Kev siv tshuab evaporation muaj kev cuam tshuam zoo rau cov txheej txheem zoo, thiab muaj cov kev xav tau sib txawv rau cov hlau, tshwj xeeb hlau thiab cov khoom sib txuas. Piv txwv li, qee cov hlau yuav tsum tau evaporated sai, thaum lwm tus tsis haum. Cov txheej txheem cua sov thiab cov duab ntawm evaporation qhov chaw kuj yuav tsum yog Nws nyob ntawm cov khoom siv evaporation.

Longkou Bit tshwj xeeb hauv kev tsim cov khoom siv PVD lub tshuab nqus tsev, thiab muab cov neeg siv khoom nrog PVD cov khoom muag, cov khoom siv nqus tsev & cov khoom siv muag, kev tu thiab kho, kev sib tham, turnkey thiab lwm yam kev pabcuam. Cov khoom siv PVD feem ntau suav nrog: ntau lub tshuab nqus tsev vacuum txheej, cov khoom siv magnetron sputtering lub tshuab nqus tsev txheej, evaporation series nqus txheej cov khoom siv thiab lwm yam khoom siv lub tshuab nqus tsev sib xyaw monomer thiab cov khoom siv txuas ntxiv, feem ntau yog siv rau cov hlau thiab tsis yog hlau, yas, cov ntaub ntawv sib xyaw thiab lwm yam. Cov dej num kho mob, cov khoom siv lub tshuab nqus tsev yog siv rau ntau yam lag luam, suav nrog cov khoom siv kho vajtse, pwm, ceramics, khoom siv huv, saib, 3C, optics, tshuaj pleev ib ce, tsheb, kev sib txuas lus thiab lwm yam lag luam.

Daim ntawv thov

Parameter

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