Spin Txheej Tshuab

Intermediate zaus sputtering kuj yog ib hom magnetron sputtering.

Muaj ntau hom magnetron sputtering, uas tuaj yeem muab faib ua DC magnetron sputtering, xov tooj cua frequencymagnetron sputtering, thiab nruab nrab zaus magnetron sputtering raws li lub zog siv. Cov khoom siv hluav taws xob siv hauv DC magnetron sputtering yog DC high-voltage fais fab mov, feem ntau yog 300-1000 V, uas yog tus cwj pwm los ntawm kev sib txuas ceev ceev, tus nqi qis, thiab kev saib xyuas pheej yig hauv lub sijhawm tom qab. Txawm li cas los xij, tsuas yog lub hom phiaj hlau tuaj yeem sputtered. Yog hais tias lub hom phiaj yog ib qho insulator, raws li lub sputtering zuj zus, lub hom phiaj yuav sau ib tug loj npaum li cas ntawm tus nqi, ua rau tsis muaj peev xwm ntawm sputtering mus ntxiv. Yog li ntawd, DC magnetron sputtering feem ntau yog siv rau cov hom phiaj hlau. Vim nws cov nqi qis thiab cov qauv yooj yim, nws tau siv dav hauv kev lag luam. Qhov zaus ntawm RF fais fab mov siv hauv RF magnetron sputtering feem ntau yog 13.56 MHz, uas tuaj yeem daws qhov teeb meem uas DC magnetron sputtering tsis tuaj yeem sputter insulating lub hom phiaj. Cov yam ntxwv ntawm RF magnetron sputtering yog: ob qho tib si insulating lub hom phiaj thiab hlau lub hom phiaj yuav sputtered, thiab adhesion ntawm zaj duab xis thiab substrate muaj zog. Txawm li cas los xij, vim yog cov qauv tsim thiab cov cuab yeej siv, tus nqi siab ntawm RF fais fab mov, tus nqi kho mob siab, hluav taws xob rau tib neeg lub cev, thiab qhov xav tau rau kev sib txuas sab nraud, nws tsis haum rau kev tsim khoom. Intermediate zaus magnetron sputtering feem ntau yog siv rau reactive sputtering los npaj cov yeeb yaj kiab hlau. Ntxiv nrog rau argon, ib qho me me ntawm cov roj reactive xws li nitrogen, oxygen, thiab lwm yam ntxiv rau hauv kab noj hniav kom tso cov molecules ntawm cov roj reactive nrog cov atom ntawm cov khoom siv. ontothe substrate los ua ib tug hlau compound zaj duab xis. Txij li thaum DC magnetron sputtering yog dav siv nyob rau hauv kev lag luam, lub magnetron sputtering rooj muaj xws li lub tshuab nqus tsev, ib tug sputtering txheej system, roj thiab ib tug tswj system.

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